In NANO-X, all major equipments are interconnected by ultrahigh vacuum pipes (10-8 Pa in main pipes). The transfer and exchange of samples between different equipments can be realized in ultrahigh vacuum (or controlled environment) to solve the sample contamination issues. The main equipments of NANO-X are as follows:
Material growth equipment: MOCVD、MBE etc.
Device fabrication equipment: PECVD、Sputter、ICP、IBE、dry photoetching machine etc.
Characterization&test equipment: FIB、TEM、SEM、STM、ARPES、XPS etc.