Vacuum Interconnected Nanotech Workstation
Vacuum Interconnected Nanotech Workstation (NANO-X) is the first integrated research platform for nanoscience and nanotechnology in the world, with capabilities for material growth, device fabrication, characterization and test in the same vacuum interconnected workstation. NANO-X has initial investment of 320 million RMB and total investment of 2 billion RMB in the future. NANO-X aims to be incorporated into national large research infrastructure system, and a world-class public integrated research platform for nanoscience and nanotechnology, providing important support for the national strategy of high technologies.
In NANO-X, all major equipments are interconnected by ultrahigh vacuum pipes (10-8 Pa in main pipes). The transfer and exchange of samples between different equipments can be realized in ultrahigh vacuum (or controlled environment) to solve the sample contamination issues. The main equipments of NANO-X are as follows:
Material growth equipment: MOCVD、MBE etc.
Device fabrication equipment: PECVD、Sputter、ICP、IBE、dry photoetching machine etc.
Characterization&test equipment: FIB、TEM、SEM、STM、ARPES、XPS etc.