LAB Equipment of Nanofabrication Facility----Suzhou Institute of Nano-Tech and Nano-Bionics,Chinese Academy of Sciences

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LAB Equipment of Nanofabrication Facility

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2015-04-29

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E-Beam Lithography (JBX5500ZA)	Stepper (NSR1755i7B)	Photo Lithography (SUSS MA6/BA6)

Bonder (SUSS CB6L)	E-Beam Evaporator (ULVAC Ei-5z)	PECVD (OXFORD SYSTEM 100)

Sputter (Kurt J. Lesker LAB-18)	Optical (Coating Machine (OTFC-900)	Advanced Silicon Etcher (STS MPXHRM)

III-V ICP Plasma Etcher (OXFORD ICP 180)	Ion Beam Etching System (150A)	CMP (AL-380L/P)

Flip chip Bonder (FC150)	Laser scriber (New Wave Titan)	West Bond (747677E)

Solder Reflow OVEN (SRO-702-R)	Scanning Electron Microscopy (JSM6390)	Surface Profiler (DEKTAK 150)

X-ray Inspection system (XTV160)	Scanning Acoustic Microscope (D9500)	Focused Ion beam (FEI XL830)

Ion Implanting System (NV-GSD-HE)	The Parallel Seam Sealing System (SM8500)	Laser Dicing Machine (ML200plus)

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